Material composition analysis includes spectrum (UV, IR, NMR); Chromatography (gas chromatography, liquid chromatography, ion chromatography); Mass spectrometry (mass spectrometry, gas chromatography-mass spectrometry and liquid chromatography-mass spectrometry); Energy spectrum (fluorescence spectrum, diffraction spectrum); Thermal spectrum (thermogravimetric analyzer, differential scanning calorimeter) comprehensively analyzes the sample, and through the joint application of various separation and analysis methods, the components in the sample are qualitatively and quantitatively analyzed, so as to determine the structure of each component in the substance. Among many analysis methods, X-ray energy spectrum analysis is the most commonly used method for preliminary analysis of elemental composition. The advantage of this analysis method is that it can correspond the micro-area element composition with the microstructure, and it is a kind of microstructure composition analysis, while the general chemical composition analysis, fluorescence analysis and spectral analysis analyze the average element composition in a wide range, which can not correspond to the microstructure and can not directly study the relationship between the microstructure and the material properties.
The analysis is mainly to determine the element composition with the content above 0. 1%. In the test process, for non-conductive samples, such as ceramics, peeling, organic matter, etc. In the process of image observation and composition analysis of electron probe, discharge, electron beam drift, surface thermal damage and other phenomena will occur, which will lead to the inability to locate the analysis point and focus the image. When the electron beam current is large, some samples will bubble and melt at the electron beam bombardment point. In order to make the sample surface conductive, a conductive film such as gold or carbon must be evaporated on the sample surface.
X-ray energy spectrum analysis methods include point analysis, line analysis and area analysis.
Point analysis refers to the analysis of the selected area of the sample surface irradiated (bombarded) by the incident electron beam. This method is suitable for fast scanning a small area of the sample surface with incident electron beams. The area of point analysis is generally from several cubic microns to dozens of cubic microns. This method is used for qualitative or quantitative analysis of microstructure.